Adept SPH-2200 is a fully mechanized autonomous indoor vehicle used for handling 150 or 200 mm SMIF Pods within any semiconductor fab with no additional infrastructure or dedicated space required. This semiconductor automation solution is designed to exchange SMIF pods from a variety of stations, including processing equipment, stockers, and storage racks. It moves nimbly within narrow aisles and operates in the same workspace as people without disrupting daily operations for installation and maintenance. SMIF pod movement is initiated by integrating the Adept Enterprise Manager software with a facility‘s production software system to distribute transport requests across the fleet of SMIF Pod Handlers. The SPH-2200 improves yield by automatically moving and placing pods from one machine to another with reduced vibration and handling, thereby, reducing the number of particles generated by human activity and increasing operational efficiency by tracking Work-In-Progress and re-applying expensive labor from handling goods to higher-value tasks.
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